A portable three-dimensional stylus profile measuring instrument

Precision Engineering

Volumn 18, Issue 2-3, 1996, Pages 147-156

  Badami, V G ^a   Smith, S T ^a   Raja, J ^a   Hocken, R J ^a  

^a UNIVERSITY OF NORTH CAROLINA AT CHARLOTTE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CALIBRATION; DIFFRACTION GRATINGS; INTERFEROMETRY; LASERS; NATURAL FREQUENCIES; PROBES; SURFACE MEASUREMENT; THREE DIMENSIONAL; TRANSDUCERS;

PORTABLE MEASURING INSTRUMENT; STYLUS PROFILE; SURFACE PROFILER; THERMAL COEFFICIENT; VERTICAL SENSITIVITY;

SENSORS;

EID: 0030127940     PISSN: 01416359     EISSN: None     Source Type: Journal    
DOI: 10.1016/0141-6359(95)00071-2     Document Type: Article

References (4)

1. Sayles, R. S. and Thomas, T. R. "Mapping of a small area of surface," J Phys E: Sci Instrum 1976, 9, 855-861
2. Teague, E. C., Scire, F. E., Baker, S. M., and Jensen, S. W. "Three-dimensional stylus profilometry," Wear 1982, 83, 1-12
3. Morrison, E. "A prototype scanning stylus profilometer for rapid measurement of small surface areas," Int J Mach Tools Manufact 1995, 35, 325-331
4. Xu, Y., Smith, S. T., Atherton, P. D., Judge, T., and Jones, R. "A metrological scanning force microscope," Prec Eng, 1996, 19, in press