Embedded optical sensors and data processing for thin film deposition

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3742, Issue , 1999, Pages 198-204

  Robbins, David J ^a   Marrs, Alan D ^a   Pickering, Christopher ^a   Dann, Allister W ^a   Glasper, John L ^a   Russell, John ^a  

^a DEFENCE SCIENCE AND TECHNOLOGY LABORATORY   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; CHEMICAL REACTORS; DATA PROCESSING; DEPOSITION; ELLIPSOMETRY; EPITAXIAL GROWTH; LASER BEAMS; SEMICONDUCTING FILMS; SEMICONDUCTING SILICON COMPOUNDS; SILICON WAFERS; THERMOMETERS;

LASER ABSORPTION RADIATION THERMOMETRY; SILICON GERMANIUM ALLOYS; SPECTROSCOPIC ELLIPSOMETRY; THIN FILM DEPOSITION;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0032681629     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.346246     Document Type: Conference Paper

References (6)