Effects of substrate temperature on properties for transparent conducting ZnO:Al films on organic substrate deposited by r.f. sputtering

Journal of Materials Science and Technology

Volumn 17, Issue 5, 2001, Pages 517-520

  Zhang, Deheng ^a   Zhang, Dejun ^a   Wang, Qingpu ^a   Yang, Tianlin ^a  

^a SHANDONG UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; DOPING (ADDITIVES); SPUTTER DEPOSITION; THERMAL EFFECTS; ZINC OXIDE;

CONDUCTING FILMS; FILM OPTOELECTRIC PROPERTIES;

CONDUCTIVE FILMS;

EID: 0035467449     PISSN: 10050302     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (11)