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Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 40, Issue 9 A, 2001, Pages 5281-5284

Fabrication of Bi-La-Sr-Mn-O uncooled microbolometer

(5) Hayashi, Ken Ichi a Ohta, Eiji a Wada, Hideo b Higuma, Hiroko c Miyashita, Shoji c

a KEIO UNIVERSITY (Japan)

b JAPAN DEFENSE AGENCY (Japan)

c MITSUBISHI ELECTRIC CORPORATION (Japan)

Author keywords

Lanthanum manganite; Microbolometer; Noise equivalent temperature difference; Temperature coefficient of resistance; Uncooled infrared detector

Indexed keywords

AMORPHOUS SILICON; CMOS INTEGRATED CIRCUITS; FILMS; HEAT RESISTANCE; INFRARED DEVICES; LANTHANUM COMPOUNDS; LIGHT ABSORPTION; MAGNETRON SPUTTERING; MANGANESE COMPOUNDS; PEROVSKITE; THERMAL CONDUCTIVITY;

INFRARED BOLOMETER MATERIAL; LANTHANUM MANGANITE; MICROBOLOMETER; NOISE EQUIVALENT TEMPERATURE DIFFERENCE; PEROVSKITE MANGANESE OXIDE; UNCOOLED INFRARED DETECTOR;

BOLOMETERS;

EID: 0035456974 PISSN: 00214922 EISSN: None Source Type: Journal
DOI: 10.1143/jjap.40.5281 Document Type: Article

Times cited : (7)

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