Analysis of a 'perfect' sputter experiment

Surface and Interface Analysis

Volumn 26, Issue 7, 1998, Pages 512-517

  Glazov, L G ^a,c   Shulga, V I ^b   Sigmund, P ^a  

^a UNIVERSITY OF SOUTHERN DENMARK   (Denmark)

^b MOSCOW STATE UNIVERSITY   (Russian Federation)

^c INSTITUTE OF HIGH CURRENT ELECTRONICS   (Russian Federation)

Author keywords

Balance equation; Binary collision simulation; Isotope sputtering; Mixing; Sputter profiling; Sputtering

Indexed keywords

ATOMS; COMPUTER SIMULATION; ISOTOPES; SECONDARY ION MASS SPECTROMETRY; STOICHIOMETRY;

BINARY COLLISION SIMULATION; ION SCATTERING; SPUTTER PROFILING;

SPUTTERING;

EID: 0032092094     PISSN: 01422421     EISSN: None     Source Type: Journal    
DOI: 10.1002/(SICI)1096-9918(199806)26:7<512::AID-SIA394>3.0.CO;2-N     Document Type: Article

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