Micro-to-macro fluidic interconnectors with an integrated polymer sealant

Journal of Micromechanics and Microengineering

Volumn 11, Issue 5, 2001, Pages 577-581

  Tsai, Jr Hung ^a,b   Lin, Liwei ^b  

^a UNIVERSITY OF MICHIGAN   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPILLARY TUBES; MICROMACHINING; ORGANIC POLYMERS; SEALANTS; SILICON WAFERS;

LEAKAGE TEST; MICRO TO MACRO FLUIDIC INTERCONNECTION; MICROCHAMBER; MICROSCALE CHANNEL;

COMPOSITE MICROMECHANICS;

EID: 0035443908     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/11/5/321     Document Type: Article

References (7)

1. A valve-less planar pump in silicon
2. The first self-priming and bi-directional valve-less diffuser micropump for both liquid and gas
3. Smallest dead volume microvalves for integrated chemical analyzing systems
4. Enhanced chromatographic performance of silicon-micromachined capillary colume with clean structure and interactive plasma organic films
5. Novel microstructures and technologies applied in chemical analysis techniques
6. Novel interconnection technologies for integrated microfluidic systems
7. Micromachined rubber O-ring micro-fluidic couplers