Enhanced chromatographic performance of silicon-micromachined capillary column with clean structure and interactive plasma organic films

International Conference on Solid-State Sensors and Actuators, Proceedings

Volumn 1, Issue , 1997, Pages 515-518

  Hannoe, Shinsuke ^a   Sugimoto, Iwao ^a   Yanagisawa, Keiichi ^a   Kuwano, Hiroki ^a  

^a NTT CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACETIC ACID; COLUMN CHROMATOGRAPHY; ETCHING; GAS CHROMATOGRAPHY; HYDROFLUORIC ACID; MICROMACHINING; NITRIC ACID; SUBSTRATES;

ISOTROPIC WET ETCHING; ULTRASONIC MACHINING;

CAPILLARY TUBES;

EID: 0030691369     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)