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Volumn 55, Issue 9, 2001, Pages 1207-1213

IR and EPR study of the Na ion-implanted SiO2/Si system

(5) Nagai, N a Yamaguchi, Y a Saito, R a Hayashi, S a Kudo, M a

Author keywords

Effective medium analysis (EMA); Electron paramagnetic resonance; EPR; Fourier transform infrared spectroscopy; FT IR; Ion implantation; Na ion; Principal component analysis (PCA); SiO2; Two Dimensional correlation analysis (2DCA); Voids

Indexed keywords

ANNEALING; BAND STRUCTURE; CORRELATION METHODS; FOURIER TRANSFORM INFRARED SPECTROSCOPY; ION IMPLANTATION; PARAMAGNETIC RESONANCE; PRINCIPAL COMPONENT ANALYSIS; SEMICONDUCTING FILMS;

EFFECTIVE MEDIUM ANALYSIS (EMA);

SILICA;

EID: 0035438560 PISSN: 00037028 EISSN: None Source Type: Journal
DOI: 10.1366/0003702011953216 Document Type: Article

Times cited : (7)

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