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Volumn 148, Issue 4, 2001, Pages 195-198
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Improving characteristics of Si-based trench-electrode metal-semiconductor-metal photodetectors using self-aligned process
a a a a |
Author keywords
[No Author keywords available]
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Indexed keywords
ELECTRIC CURRENTS;
ELECTRIC POTENTIAL;
ELECTRODES;
QUANTUM EFFICIENCY;
SEMICONDUCTING SILICON;
SEMICONDUCTOR DEVICE MANUFACTURE;
SEMICONDUCTOR METAL BOUNDARIES;
DARK CURRENTS;
PHOTODETECTORS;
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EID: 0035429480
PISSN: 13502433
EISSN: None
Source Type: Journal
DOI: 10.1049/ip-opt:20010636 Document Type: Conference Paper |
Times cited : (5)
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References (9)
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