Measurement capabilities of optical 3D-sensors for MST applications

Microelectronic Engineering

Volumn 41-42, Issue , 1998, Pages 623-626

  Brand, U ^a   Flugge J ^a  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

MEASUREMENTS; MICROELECTRONICS; NANOTECHNOLOGY; OPTICS; SURFACE ROUGHNESS; THREE DIMENSIONAL;

MICROSYSTEM TECHNOLOGY;

SENSORS;

EID: 12844266379     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(98)00146-4     Document Type: Article

References (9)

1. Scanning white light interference microscope Prosurf of the Fraunhofer Institute of Applied Optics and Precision Mechanics, Schillerstr. 1, 07745 Jena, Germany
2. Coherence radar of Prof. Haeusler, Institute of Optics, University of Erlangen/Nuernberg, Staudtstr. 7/B2, 91058 Erlangen, Germany
3. Fringe projection instrument MacroPLAN of the Omeca Messtechnik GmbH, Warthestr. 21, 14513 Teltow, Germany
4. A kind of confocal microscope the Micro VIEW of the Omeca Messtechnik GmbH, Warthestr. 21, 14513 Teltow, Germany
5. Scanning white light interference microscope New View of the Zygo Corp., Laurel Brook Road, P.O. Box 448, Middlefield, CT 06455-0448, USA
6. Stylus instrument Formtalysurf of the Rank Taylor Hobson Ltd., P. O. Box 36, New Star Road, Leicester, England LE4 7JQ
7. Stylus instrument P11 of Tencor, 3231 Scott Blv., Santa Clara, CA 95054, USA
8. Hillmann, W.; Brand, U.; Krystek, M.: Capabilities and limitations of interference microscopy for two- and three-dimensional surface-measuring technology. Measurement 19, 2 (1996), 95-102
9. Unfortunately the data set was not available at the time of writing this article, so the plot delivered by the manufacturer of the instrument had to be used.