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Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 182, Issue 1-4, 2001, Pages 187-192

Reactive scattering of O+ on oxidized Si(0 0 1)

(4) Quinteros, C L a Tzvetkov, T a Qin, X a Jacobs, D C a

a UNIVERSITY OF NOTRE DAME (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FILM GROWTH; ION BEAMS; OXIDATION; POLYSILICON; POSITIVE IONS; SCATTERING; SINGLE CRYSTALS;

REACTIVE SCATTERING;

THIN FILMS;

EID: 0035416841 PISSN: 0168583X EISSN: None Source Type: Journal
DOI: 10.1016/S0168-583X(01)00674-7 Document Type: Conference Paper

Times cited : (6)

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