Eley-Rideal reaction of O+ with oxidized Si(100)

Journal of Chemical Physics

Volumn 113, Issue 13, 2000, Pages 5119-5122

  Quinteros, C L ^a   Tzvetkov, T ^a   Jacobs, D C ^a  

^a UNIVERSITY OF NOTRE DAME   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

KINETIC ENERGY; MOLECULAR BEAMS; OXYGEN; REACTION KINETICS; THIN FILMS;

ABSTRACTION REACTIONS; ELEY-RIDEAL REACTIONS; HYPERTHERMAL ENERGY; TRANSLATIONAL ENERGY;

SILICON COMPOUNDS;

EID: 0034300273     PISSN: 00219606     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1311780     Document Type: Article

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