An interferometer system scheme for the fast measurement of small displacement

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3482, Issue , 1998, Pages 908-913

  Li, Ruiming ^a   Aruga, Tadashi ^a  

^a Ministry of Posts and Telecommunications   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

MICHELSON INTERFEROMETERS;

ABSOLUTE DISPLACEMENT; FAST MEASUREMENT; HIGH SPEED; INTERFEROMETER SYSTEMS; LASER SOURCES; MODULATION TECHNIQUES; PHASE AMBIGUITY; SMALL DISPLACEMENT;

OPTICAL DESIGN;

EID: 0002938272     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.322034     Document Type: Conference Paper

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3. Bruce L. Danielson, et al. Applied Optics, Vol. 30, No. 21, (1991), P 2975.
4. Peter De Groot, et al. Applied Optics, Vol. 30, No. 28, (1991), P 4026.
5. Ho Seong Lee, et al. Rev. Sci. Instrum. Vol. 67, No. 8, (1996), P 2671.