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IEEE Journal on Selected Topics in Quantum Electronics

Volumn 7, Issue 4, 2001, Pages 624-629

Dielectric constant measurement of thin films using goniometric terahertz time-domain spectroscopy

(8) Li, Ming b,c Fortin, Jeffery b Kim, Jin Y b Fox, G d Chu, F d Davenport, T d Lu, Toh Ming b Zhang, Xi Cheng a,b

a IEEE

b RENSSELAER POLYTECHNIC INSTITUTE (United States)

c APPLIED MATERIALS INC (United States)

d Ramtron International Corporation (United States)

Author keywords

Brewster angle; Dielectric constant; Phase shift; Terahertz beam; Thin film

Indexed keywords

CURVE FITTING; ELECTROMAGNETIC WAVES; ELLIPSOMETRY; GONIOMETERS; PERMITTIVITY MEASUREMENT; PHASE SHIFT; SILICON WAFERS; SPECTROSCOPY; SURFACES; THIN FILMS; ULTRASHORT PULSES;

BREWSTER ANGLE; DIELECTRIC CONSTANT MEASUREMENT; GIGAHERTZ; GONIOMETRIC TERAHERTZ TIME DOMAIN SPECTROSCOPY; TERAHERTZ; ULTRAFAST OPTOELECTRONIC SYSTEM; ULTRASHORT ELECTROMAGNETIC PULSE;

OPTOELECTRONIC DEVICES;

EID: 0035410142 PISSN: 1077260X EISSN: None Source Type: Journal
DOI: 10.1109/2944.974234 Document Type: Article

Times cited : (26)

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