Synthesis of α-silicon nitride powder by gas-phase ammonolysis of CH3SiCl3

Journal of the European Ceramic Society

Volumn 21, Issue 7, 2001, Pages 947-958

  Ziegenbalg, Gerald ^a   Breuel, Ulrich ^a   Ebrecht, Eila ^a   Holldorf, Horst ^a   Brink, Reinhold ^b  

^a TU BERGAKADEMIE FREIBERG   (Germany)

^b BAYER AG   (Germany)

Author keywords

CH3SiCl3; Powders gas phase reaction; Si3N4

Indexed keywords

AMMONIA; COMPOSITION; CRYSTALLIZATION; DECHLORINATION; EXHAUST GASES; MASS SPECTROMETRY; NITRIDES; NUCLEAR MAGNETIC RESONANCE; SILICON; SUBSTITUTION REACTIONS;

RADICAL FORMING;

CERAMIC MATERIALS;

CERAMICS;

EID: 0035399743     PISSN: 09552219     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0955-2219(00)00275-2     Document Type: Article

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