The structure of chemical vapor deposited silicon carbide

Thin Solid Films

Volumn 40, Issue C, 1977, Pages 57-72

  Chin, J ^a   Gantzel, P K ^a   Hudson, R G ^a  

^a GENERAL ATOMICS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTALS - STRUCTURE; NUCLEAR REACTORS - FUSION;

CHEMICAL VAPOR DEPOSITION;

SILICON CARBIDE;

EID: 0016903795     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/0040-6090(77)90103-1     Document Type: Article

References (9)

1. Generation of a two-dimensional silicon carbide lattice
2. Mechanism of solid state transformations in silicon carbide
3. The crystal structure of silicon carbide
4. Green and black silicon carbide
5. Crystal, whisker and microcrystalline forms of silicon carbide
6. Chemically vapor deposited SiC for high temperature and structural applications
7. Growth mechanisms of silicon carbide in vapour deposition
8. Deposition and microstructure of vapor-deposited silicon carbide
9. Chemical vapor deposition of silicon carbide tetrachloride-methane-hydrogen mixtures