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Volumn 75, Issue 7, 1998, Pages 22-24
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Synthesis of Si3N4 powder by gas phase reaction of chlorosilanes with ammonia
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Author keywords
[No Author keywords available]
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Indexed keywords
AMMONIA;
CRYSTALLIZATION;
DEHALOGENATION;
FRACTURE TOUGHNESS;
SILANES;
SINTERING;
SYNTHESIS (CHEMICAL);
CHLOROSILANES;
GAS PHASE REACTION;
SILICON NITRIDE;
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EID: 0032114730
PISSN: 01739913
EISSN: None
Source Type: Journal
DOI: None Document Type: Article |
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Times cited : (2)
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References (5)
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