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Volumn 33, Issue 5, 2001, Pages 313-320
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Miniaturized 3-D surface profilometer using a fiber optic coupler
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Author keywords
3 D mapping; Profilometry; Surface mapping
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Indexed keywords
COMPUTER SIMULATION;
INTERFEROMETERS;
PROFILOMETRY;
SURFACE TREATMENT;
PROFILOMETERS;
SURFACE MAPPING;
SURFACE RECONSTRUCTION;
OPTICAL FIBER COUPLING;
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EID: 0035397801
PISSN: 00303992
EISSN: None
Source Type: Journal
DOI: 10.1016/S0030-3992(01)00023-8 Document Type: Article |
Times cited : (47)
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References (20)
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