Balanced membrane micromachined loudspeaker for hearing instrument application

Journal of Micromechanics and Microengineering

Volumn 11, Issue 4, 2001, Pages 334-338

  Rehder, Jörg ^a   Rombach, Pirmin ^a   Hansen, Ole ^a  

^a TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; BANDWIDTH; ELECTRIC CURRENTS; MAGNETIC FLUX; MICROMACHINING; PRESSURE EFFECTS;

PLANAR COILS;

LOUDSPEAKERS;

EID: 0035396072     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/11/4/308     Document Type: Article

References (9)

1. Piezoelectric cantilever microphone and microspeaker
2. Electrostatically excited diaphragm driven as a loudspeaker
3. A micro-machined loudspeaker for the hearing impaired
4. A bi-directional magnetic micro-pump on a silicon wafer
5. Microactuation based on thermally-driven phase-change
6. CMOS-compatible electrets for application in micromechanical transducers
7. A new basic technology for magnetic micro-actuators
8. Characterisation of planar microcoil for implantable microsystems