CMOS-compatible electrets for application in micromechanical transducers

Conference on Electrical Insulation and Dielectric Phenomena (CEIDP), Annual Report

Volumn 1, Issue , 1998, Pages 132-135

  Amjadi, Houman ^a   Sessler, Gerhard M ^a  

^a DARMSTADT UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; ELECTRETS; ELECTRIC CHARGE; ELECTRIC POTENTIAL; ELECTRODES; ETCHING; MEMBRANES; MICROELECTROMECHANICAL DEVICES; MOISTURE; SILICON NITRIDE; TRANSDUCERS;

CHARGE STABILITY; CHARGEABILITY; MICROMECHANICAL TRANSDUCERS;

ELECTRIC INSULATING MATERIALS;

EID: 0032306971     PISSN: 00849162     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)