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Journal of Micromechanics and Microengineering

Volumn 11, Issue 4, 2001, Pages 301-305

Micromachined filters for 38 and 77 GHz supported on thin membranes

(14) Muller A a Constantinidis, G b Giaccomozzi, F c Lagadas, M b Deligeorgis, G b Iordanescu, S a Petrini, I a Vasilache, D a Marcelli, R d Bartolucci, G e Neculoiu, D a Buiculescu, C a Blondy, P f Dascalu, D a

a NATIONAL INSTITUTE FOR RESEARCH AND DEVELOPMENT IN MICROTECHNOLOGIES (Romania)

b INSTITUTE OF ELECTRONIC STRUCTURE AND LASER (Greece)

c ITC IRST (Italy)

d M2T Project Sensors and Microsystems (Italy)

e UNIVERSITY OF ROME TOR VERGATA (Italy)

f Centre National de la Recherche Scientifique (France)

Author keywords

[No Author keywords available]

Indexed keywords

BANDPASS FILTERS; CHEMICAL VAPOR DEPOSITION; MICROMACHINING; MOLECULAR BEAM EPITAXY; SEMICONDUCTING ALUMINUM COMPOUNDS; SEMICONDUCTING GALLIUM ARSENIDE; SILICON WAFERS; SUBSTRATES;

MICROMACHINED FILTERS; THIN MEMBRANES;

MILLIMETER WAVE DEVICES;

EID: 0035395473 PISSN: 09601317 EISSN: None Source Type: Journal
DOI: 10.1088/0960-1317/11/4/302 Document Type: Article

Times cited : (21)

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