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Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films

Volumn 19, Issue 4, 2001, Pages 1111-1115

Quantitative comparison between Auger electron spectroscopy and secondary ion mass spectroscopy depth profiles of a double layer structure of AlAs in GaAs using the mixing-roughness-information depth model

(4) Hofmann, S a Rar, A b Moon, D W c Yoshihara, K d

a MAX PLANCK INSTITUTE FOR INTELLIGENT SYSTEMS (Germany)

b UNIVERSITY OF ALABAMA (United States)

c Korea Research Institute of Standards and Science (South Korea)

d NATIONAL INSTITUTE FOR MATERIALS SCIENCE (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM COMPOUNDS; AUGER ELECTRON SPECTROSCOPY; DIMERS; IONIZATION; MULTILAYERS; SECONDARY ION MASS SPECTROMETRY; SPUTTERING; SURFACE ROUGHNESS;

DOUBLE LAYER STRUCTURE;

SEMICONDUCTING GALLIUM ARSENIDE;

EID: 0035393104 PISSN: 07342101 EISSN: None Source Type: Journal
DOI: 10.1116/1.1345899 Document Type: Article

Times cited : (12)

References (19)

1
- 0001511073
- (1995) Rep. Prog. Phys. , vol.58 , pp. 1321
- Zalm, P.¹

2
- 5844306503
- (1997) J. Vac. Sci. Technol. A , vol.15 , pp. 460
- Iltgen, K.¹ Bendel, C.² Benninghoven, A.³ Niehuis, E.⁴

3
- 1542680532
- (1998) Rep. Prog. Phys. , vol.61 , pp. 827
- Hofmann, S.¹

4
- 0000469775
- SIMS X, edited by A. Benninghoven, B. Hagenhoff, and H. W. Werner (Wiley, Chichester)
- (1997) Secondary Ion Mass Spectrometry , pp. 371
- Cooke, G.A.¹ Smith, N.S.² Dowsett, M.G.³ Burke, H.R.G.⁴ Phillips, P.J.⁵

5
- 0004531026
- (1998) Jpn. J. Appl. Phys., Part 2 , vol.37
- Hofmann, S.¹ Rar, A.²

6
- 0028494730
- (1994) Surf. Interface Anal. , vol.21 , pp. 673
- Hofmann, S.¹

7
- 0001827369
- (1999) J. Surf. Anal. , vol.5 , pp. 40
- Hofmann, S.¹ Yoshihara, K.²

8
- 0003776072
- Wiley, New York
- (1987) Secondary Ion Mass Spectrometry
- Benninghoven, A.¹ Ruedenauer, F.G.² Werner, H.W.³

9
- 0004508933
- (1999) J. Surf. Anal. , vol.6 , pp. 29
- Rar, A.¹ Moon, D.W.² Hofmann, S.³

10
- 0004472853
- Ref. 4
- Wucher, A.¹ Wahl, M.²

11
- 0026401803
- (1991) Surf. Interface Anal. , vol.17 , pp. 927
- Tanuma, S.¹ Powell, C.J.² Penn, D.R.³

12
- 0027642007
- (1993) Surf. Interface Anal. , vol.20 , pp. 771
- Jablonski, A.¹ Powell, C.J.²

13
- 0034245329
- (1999) Surf. Interface Anal. , vol.30 , pp. 228
- Hofmann, S.¹

14
- 0001194183
- (1998) J. Vac. Sci. Technol. A , vol.16 , pp. 1096
- Hofmann, S.¹ Schubert, J.²

15
- 0033364587
- (1999) Thin Solid Films , vol.355-356 , pp. 390
- Rar, A.¹ Kojima, I.² Moon, D.W.³ Hofmann, S.⁴

16
- 0003412161
- Pergamon, New York
- (1985) The Stopping Range of Ions in Solids
- Ziegler, J.F.¹ Biersack, J.P.² Littmark, U.³

17
- 0031219808
- (1997) Vacuum , vol.48 , pp. 607
- Hofmann, S.¹

18
- 0001214275
- (1992) J. Vac. Sci. Technol. B , vol.10 , pp. 316
- Hofmann, S.¹

19
- 0012543956
- SIMS IX, edited by A. Benninghoven, Y. Nihei, R. Shimizu, and H. W. Werner (Wiley, Chichester)
- (1994) Secondary Ion Mass Spectrometry , pp. 3
- Yamamura, Y.¹

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