Influence of deposition parameters on layer structure of Ag/C multilayer zone plates for use in hard X-ray region

Thin Solid Films

Volumn 281-282, Issue 1-2, 1996, Pages 243-245

  Tamura, Shigeharu ^a   Ohtani, Kazuo ^a   Kamijo, Nagao ^a   Suzuki, Yoshio ^b   Kihara, Hiroshi ^c  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^b HITACHI LTD   (Japan)

^c KANSAI MEDICAL UNIVERSITY   (Japan)

Author keywords

Multilayers; Optical coatings; Sputtering

Indexed keywords

ARGON; CARBON; FOCUSING; OPTICAL COATINGS; OPTICAL DEVICES; OPTICAL SHUTTERS; SILVER; SPUTTER DEPOSITION; SUBSTRATES; SYNCHROTRON RADIATION; THICKNESS MEASUREMENT; X RAY ANALYSIS;

DEPOSITION PARAMETERS; FOCUSING TEST; HARD X RAY REGION; LAYER STRUCTURE; MICROFOCUSING OPTICS; MULTILAYER INTERFACE; THICKNESS MONITOR; X RAY MICROBEAM; ZONE PLATES;

MULTILAYERS;

EID: 0030218725     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/0040-6090(96)08642-7     Document Type: Article

References (9)

1. J.H. Underwood, A.C. Thompson, Y. Wu and R.D. Giauque, Nucl. Instrum. Methods A, 266 (1988) 296.
2. Y. Suzuki and F. Uchida, Rev. Sci. Instrum., 63 (1992) 578.
3. S. Hayakawa, Y. Gohshi, A. Iida, S. Aoki and K. Sato, Rev. Sci. Instrum., 62 (1991) 2545.
4. A. Iida and T. Noma, Nucl. Instrum. Methods B, 82 (1993) 129.
5. K. Saitoh, K. Inagawa, K. Kohra, C. Hayashi, A. Iida and N. Kato, Jpn. J. Appl. Phys., 27 (1989) L2131.
6. W.B. Yun, B. Lai, D. Legnini, Y.H. Xiao, J. Chrzas, K.M. Skulina, R.M. Bionta, V. White and F. Cerrina, Proc. SPIE, 1740 (1992) 117.
7. S. Tamura, K. Ohtani and N. Kamijo, Appl. Surf. Sci., 79/80 (1994) 514.
8. N. Kamijo, S. Tamura, Y. Suzuki and H. Kihara, Rev. Sci. Instrum., 66 (1995) 2132.
9. J.A. Thornton, J. Vac. Sci. Technol. A, 4 (1986) 3059.