The high-energy heavy ion nuclear microprobe at the University of North Texas

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 181, Issue 1-4, 2001, Pages 99-103

  McDaniel, F D ^a   Duggan, J L ^a   Yang, C ^a   Guo, B N ^a   El Bouanani, M ^a   Nigam, M ^a  

^a UNIVERSITY OF NORTH TEXAS   (United States)

Author keywords

Beam brightness; Demagnification; Microelectronics; Nuclear microprobe; Probe forming lens; Russian quadruplet configuration; Spatial resolution

Indexed keywords

HEAVY IONS; HIGH ENERGY PHYSICS; MICROELECTRONICS; MICROLENSES; PARTICLE ACCELERATORS; PROBES;

NUCLEAR MICROPROBES;

NUCLEAR INSTRUMENTATION;

EID: 0035388057     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(01)00567-5     Document Type: Conference Paper

References (8)