Oxidation behaviour of PACVD-(Ti,Al)N wear resistance layers

Mikrochimica Acta

Volumn 133, Issue 1-4, 2000, Pages 215-221

  Menzel, Siegfried ^a   Göbel, Thomas ^a   Baunack, Stefan ^a   Bartsch, Karl ^a   Wetzig, Klaus ^a  

^a IFW DRESDEN   (Germany)

Author keywords

(Ti,Al)N hard coatings; Laser shock method; Oxidation behaviour; PACVD

Indexed keywords

EID: 0003488340     PISSN: 00263672     EISSN: None     Source Type: Journal    
DOI: 10.1007/s006040070096     Document Type: Article

References (14)

1. T. Ikeda, H. Satoh, Thin Solid Films 1991, 195, 99.
2. C. W. Kim, K. H. Kim, Thin Solid Films 1997, 307, 113.
3. A. Joshi, H. S. Hu, Surface Coatings Technol. 1995, 76-77, 499.
4. H. Jehn, S. Hofmann, W.-D. Münz, Metall. 1988, 42, 7, 658.
5. D. McIntyre, J. E. Greene, G. Hakansson, J.-E. Sundgren, W.-D. Münz, J. Appl. Phys. 1990, 67, 3, 1542.
6. K. Wetzig, D. Schulze, In Situ Scanning Electron Microscopy in Materials Research. Akademie Verlag, Berlin, 1995.
7. S. Akiyama, S. Amada, Fusion Technology 1993, 23, 426.
8. K. Bartsch, A. Leonhardt, U. Langer, K. Künanz, Surface Coatings Technol. 1997, 94/95, 168.
9. A. John, Fresenius J. Anal. Chem. 1995, 353, 468.
10. J. C. Lascovich, Surf. Interface Anal. 1995, 23, 636.
11. I. L. Strydom, S. Hofmann, Vacuum 1990, 41, 1619.
12. R. K. Wild, J. C. C. Day, S. Bean, Mikrochim. Acta, p. 357.
13. A. Benninghoven, F. G. Rüdenauer, H. W. Werner, Secondary Ion Mass Spectrometry. Wiley, New York, 1987, p. 213.
14. S. Menzel, Th. Göbel, K. Bartsch, K. Wetzig, Surf. Coat. Technol. (in press).