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Volumn 142-144, Issue , 2001, Pages 642-648
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A composition spread approach to the optimization of (Ti,Al) N hard coatings deposited by DC and bipolar pulsed magnetron sputtering
a
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Author keywords
AIN; Combinatorial synthesis; Hard coatings; Oxidation resistance; Screening; TiN
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Indexed keywords
COST EFFECTIVENESS;
DC POWER TRANSMISSION;
DEPOSITION;
DIELECTRIC MATERIALS;
DRUG PRODUCTS PLANTS;
MAGNETORESISTANCE;
MAGNETRON SPUTTERING;
OPTIMIZATION;
PHOTOLUMINESCENCE;
SCREENING;
SUPERCONDUCTING MATERIALS;
TITANIUM COMPOUNDS;
HARD COATINGS;
COATING TECHNIQUES;
COATING;
CORROSION RESISTANCE;
HARDNESS;
OXIDATION;
SPUTTERING;
TRIBOLOGY;
WEAR RESISTANCE;
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EID: 0035387380
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/S0257-8972(01)01060-X Document Type: Article |
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Times cited : (19)
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References (9)
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