Non-destructive defect detection scheme using Kerr-Channel optical surface analyzer

IEEE Transactions on Magnetics

Volumn 37, Issue 4 I, 2001, Pages 1957-1959

  Tsai, Jack W H ^a   Nathanson, Marshall ^b   Kimball, Robert ^a   Geiss, Roy ^a   Logan, Tony ^a   Nguyen, Thao ^a  

^a MAXTOR CORPORATION   (United States)

^b MRN Consulting   (United States)

Author keywords

Magnetic defect; Optical surface analyzer; Read back mapping

Indexed keywords

DEFECTS; FAILURE ANALYSIS; MAGNETIC HEADS; OPTICAL KERR EFFECT; SURFACE TOPOGRAPHY;

MAGNETIC DEFECTS; MAGNETIC MARKING TECHNIQUE (MMT);

MAGNETIC FIELD EFFECTS;

EID: 0035385998     PISSN: 00189464     EISSN: None     Source Type: Journal    
DOI: 10.1109/20.951020     Document Type: Article

References (6)

1. Surface characterization for computer disks, wafers, and flat panel displays
2. Development of automatic surface inspection system for magnetic disk substrates using a laser multi-sensing technique
3. Surface analysis program for zero defects
4. Magnetic signal distribution in disk drives
5. A combined ellipsometer, reflectometer, scatterometer, and Kerr effect microscope for thin film disk characterization