MR glide inspection for hard disk defect detection

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3619, Issue , 1999, Pages 53-64

  Boyd, Michael ^a   Xu, Xiaopeng ^a  

^a Phase Metrics Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; DEFECTS; LIGHT SCATTERING; MAGNETIC HEADS; SURFACE PROPERTIES;

MAGNETIC FORCE MICROSCOPY; MAGNETIC PHASE MICROSCOPY; SCATTEROMETRY;

HARD DISK STORAGE;

EID: 0032667718     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (7)