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Volumn 3966, Issue , 2000, Pages 385-392
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Combined ellipsometer, reflectometer, scatterometer and Kerr effect microscope for thin film disk characterization
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Author keywords
[No Author keywords available]
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Indexed keywords
CORROSION;
DEFECTS;
ELLIPSOMETRY;
LIGHT SCATTERING;
MAGNETIC DISK STORAGE;
MAGNETIC FILM STORAGE;
OPTICAL KERR EFFECT;
OPTICAL MICROSCOPY;
REFLECTOMETERS;
SURFACE ROUGHNESS;
OPTICAL SURFACE ANALYZER;
SCATTEROMETERS;
COMPUTER VISION;
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EID: 0033897555
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Article |
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Times cited : (10)
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References (2)
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