Laser diode interferometer used for measuring displacements in large range with a nanometer accuracy

Optics and Laser Technology

Volumn 33, Issue 4, 2001, Pages 219-223

  Wang, Xuefeng ^a   Wang, Xiangzhao ^a   Lu, Hongbin ^a   Qian, Feng ^a   Bu, Yang ^a  

^a SHANGHAI INSTITUTE OF OPTICS AND FINE MECHANICS   (China)

Author keywords

Feedback control; Interferometer; Laser diode; Optical measurement

Indexed keywords

COMPUTER SIMULATION; FEEDBACK CONTROL; INTERFEROMETERS; PHASE MODULATION;

OPTICAL WAVELENGTH;

SEMICONDUCTOR LASERS;

EID: 0035372921     PISSN: 00303992     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0030-3992(01)00027-5     Document Type: Article

References (10)

1. Photothermal modulation of laser diode wavelength: Application to sinusoidal phase-modulating interferometer for displacement measurements
2. Common-path optical heterodyne profilemeter: A configuration
3. Sinusoidal phase modulating interferometer using optical fibers for displacement measurement
4. Sinusoidal phase-modulating Fizeau interferometer using a self-pumped phase conjugator for surface profile measurements
5. Exact measurement of flat surface profiles by object shifts in a phase-conjugate Fizeau interferometer
6. Measurement of small vibration amplitudes of a rough surface using an interferometer with a self-pumped phase-conjugate mirror
7. Two-wavelength sinusoidal phase modulating laser-diode interferometer insensitive to external disturbances
8. Two-wavelength laser-diode interferometer with fractional fringe techniques
9. Displacement measurement by synthesized light source based on fibre Bragg gratings
10. Double sinusoidal phase-modulating laser-diode interferometer using self-pumped phase-conjugate wave for measuring displacements of rough surfaces