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Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 180, Issue 1-4, 2001, Pages 58-65

Depth of origin of atoms sputtered from crystalline targets

(3) Shapiro, M H a,b Trovato, E a Tombrello, T A b

a CALIFORNIA STATE UNIVERSITY (United States)

b CALIFORNIA INSTITUTE OF TECHNOLOGY (United States)

Author keywords

Depth of origin; Sputtered atoms; Sputtering

Indexed keywords

CODES (SYMBOLS); COMPUTER SIMULATION; CRYSTALLINE MATERIALS; MONTE CARLO METHODS; SPUTTERING; TARGETS;

CRYSTALLINE TARGETS;

ATOMIC BEAMS;

EID: 0035364052 PISSN: 0168583X EISSN: None Source Type: Journal
DOI: 10.1016/S0168-583X(01)00492-X Document Type: Conference Paper

Times cited : (14)

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