Parameter space map of an electron cyclotron resonance plasma in a compact chamber

IEEE Transactions on Plasma Science

Volumn 29, Issue 3, 2001, Pages 417-423

  Lille, Jeffrey S ^a,b   McGaughnea, Patrick E ^a   Varhue, Walter J ^a  

^a IEEE   (United States)

^b University of Vermont ^*  (United States)

Author keywords

Current density versus power and pressure space map; Electron cyclotron resonance plasma; Electron temperature measurement; Ion current density profile; Ion energy measurement

Indexed keywords

ELECTRON CYCLOTRON RESONANCE PLASMA; ELECTRON TEMPERATURE MEASUREMENT; ION CURRENT DENSITY MEASUREMENT; ION ENERGY MEASUREMENT; LANGMUIR PROBE;

CURRENT DENSITY; DIFFUSION; ELECTRON CYCLOTRON RESONANCE; ELECTRON SCATTERING; PLASMA DENSITY; PROBES; TEMPERATURE;

PLASMAS;

EID: 0035363372     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/27.928938     Document Type: Article

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