New fabrication method of silicon field emitter array with local oxidation of polysilicon and chemical-mechanical-polishing

Proceedings of the IEEE International Vacuum Microelectronics Conference, IVMC

Volumn , Issue , 1996, Pages 415-418

  Lee, Jin Ho ^a   Kang, Sung Weon ^a   Kim, Sang Gi ^a   Song, Yoon Ho ^a   Cho, Kyoung Ik ^a   Yoo, Hyung Joun ^a  

^a Electronics and Telecommunications Research Institute (ETRI)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ANODES; CHEMICAL POLISHING; DIELECTRIC MATERIALS; ELECTRIC CURRENT MEASUREMENT; GATES (TRANSISTOR); LEAKAGE CURRENTS; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE MANUFACTURE; SINGLE CRYSTALS;

ANODE EMISSION CURRENT; FIELD EMITTER ARRAYS (FEA);

FIELD EMISSION CATHODES;

EID: 0030359014     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)