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Volumn 225, Issue 2-4, 2001, Pages 317-321
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Growth related distribution of secondary phase inclusions in 6H-SiC single crystals
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Author keywords
A1. Volume defects; A2. Growth from vapor; A2. Single crystal growth; B2. Semiconducting silicon compounds
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Indexed keywords
CRYSTAL DEFECTS;
CRYSTAL GROWTH;
MATHEMATICAL MODELS;
OPTICAL MICROSCOPY;
SCANNING ELECTRON MICROSCOPY;
SEMICONDUCTING SILICON COMPOUNDS;
SECONDARY PHASE INCLUSIONS;
SILICON CARBIDE;
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EID: 0035335761
PISSN: 00220248
EISSN: None
Source Type: Journal
DOI: 10.1016/S0022-0248(01)00885-5 Document Type: Conference Paper |
Times cited : (22)
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References (8)
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