Defect origin and development in sublimation grown SiC boules

Materials Science and Engineering B

Volumn 57, Issue 3, 1999, Pages 228-233

  Tuominen, M ^a,b   Yakimova, R ^a,b   Vehanen, A ^c   Janzen E ^a  

^a LINKÖPING UNIVERSITY   (Sweden)

^b Okmetic AB   (Sweden)

^c Okmetic Oyj   (Finland)

Author keywords

Macro defect; Optical microscopy; Silicon carbide crystals; Sublimation growth

Indexed keywords

CRYSTAL DEFECTS; CRYSTAL GROWTH; CRYSTAL ORIENTATION; ETCHING; OPTICAL MICROSCOPY; SINGLE CRYSTALS; SUBLIMATION;

LELY METHOD; MACRO-DEFECT; SILICON CARBIDE BOULES;

SILICON CARBIDE;

EID: 0000751238     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-5107(98)00420-6     Document Type: Article

References (6)

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