MOVPE of GaSb, (AlGa)Sb and (AlGa)(AsSb) in a multiwafer planetary reactor

Journal of Crystal Growth

Volumn 225, Issue 2-4, 2001, Pages 426-430

  Agert, Carsten ^a   Lanyi, Peter ^a   Bett, Andreas W ^a  

^a FRAUNHOFER INSTITUTE FOR SOLAR ENERGY SYSTEMS ISE   (Germany)

Author keywords

A3. Metalorganic vapor phase epitaxy; B1. Antimonides; B2. Semiconducting III V materials

Indexed keywords

KINETIC THEORY; SEMICONDUCTING ALUMINUM COMPOUNDS; SEMICONDUCTING GALLIUM ARSENIDE; THERMAL EFFECTS;

ANTIMONIDES;

METALLORGANIC VAPOR PHASE EPITAXY;

EID: 0035335111     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-0248(01)00908-3     Document Type: Conference Paper

References (15)