Effect of catalyst on growth behavior of carbon nanotube synthesizing by microwave heating thermal chemical vapor deposition process

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 19, Issue 3, 2001, Pages 1026-1029

  Chen, Shi Cheng ^a   Shih, Liang Yuan ^a   Chang, Yu Chen ^b   Tu, George C ^b   Lin, I Nan ^c  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

^b NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

^c NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

CATALYST ACTIVITY; CURRENT DENSITY; ELECTRON EMISSION; MICROWAVE HEATING; SILICON; SUBSTRATES;

DEPOSITION CHAMBERS;

CARBON NANOTUBES;

EID: 0035326444     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1375818     Document Type: Conference Paper

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