Preparation of perovskite, Pb(Zr, Ti)O3 thin-films on YSZ(11)/Si(111) substrates by post-deposition annealing

Thin Solid Films

Volumn 385, Issue 1-2, 2001, Pages 293-297

  Kim, Je Deok ^a   Hana, Sukreen ^a   Kawagoe, Shinya ^a   Sasaki, Kimihiro ^a   Hata, Tomonobu ^a  

^a KANAZAWA UNIVERSITY   (Japan)

Author keywords

(zrti+x pbo) composite target; Ferroelectric; Perovskite pzt; Post deposition annealing; Quasi metallic mode reactive sputtering (qmmrs); YSZ

Indexed keywords

ANNEALING; FERROELECTRIC THIN FILMS; FILM GROWTH; LEAD COMPOUNDS; PEROVSKITE; SPUTTER DEPOSITION; ZIRCONIA;

LEAD ZIRCONATE TITANATE; QUASI METALLIC MODE REACTIVE SPUTTERING; YTTRIA STABILIZED ZIRCONIA;

FILM PREPARATION;

EID: 0035311889     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(00)01889-7     Document Type: Article

References (14)

1. J.L. Moll, Y Tarui, IEEE Trans. Electron Dev. 10 (1963) 338.
2. K.-H. Kim, J.-D. Kim, H. Ishiwara, Appl. Phys. Lett. 66 (1995) 3143.
3. E. Tokumitsu, K. Itani, B.K. Moon, H. Ishiwara, Jpn. J. Appl. Phys. 34 (1995) 5202
4. F. Jones, J. Logan, J. Vac. Sci. Technol. A7 (1989) 1240.
5. M.T. Lanagan, J.K. Yamamoto, A. Bhalla, S.G. Sanker, Mater. Lett. 7 (1989) 437
6. H.G. Scott, J. Mater. Sci. 10 (1975) 1527.
7. T. Hata, S. Nakano, Y. Masuda, K. Sasaki, Y Haneda, K. Wasa, Vacuum 51 (1998)583.
8. S. Horii, S. Yokoyama, H. Nakajima, S. Horita, Jpn. J. Appl. Phys. 38 (1999) 5378.
9. M. Nagasima, S. Nakano, K. Sasaki, T Hata, Jpn. J. Appl. Phys. 38 (1999) L74.
10. E.S. Thiele, L.S. Wang, T.O. Mason, S.A. Barnett, J. Vac. Sci. Technol. A9 (6) (1991) 3054.
11. J.-D. Kim, S. Kawagoe, K. Sasaki, T. Hata, Jpn. J. Appl. Phys. 38 (1999) 6882
12. K. Werner, D.A. Puotinen, RCA Rev. 31 (1970) 187.
13. T. Hata, Y. Kamide, J. Vac. Sci. Technol. A5 (1987) 2154.
14. T. Hata, M. Tsuchitani, K. Kamiya, S. Horita, Jpn. J. Appl. Phys. 28 (1989) L2297.