Crystallization of amorphous WNx films

Journal of Applied Physics

Volumn 89, Issue 7, 2001, Pages 4128-4133

  Suh, Bong Seok ^a   Cho, Heung Kuon ^a   Lee, Yoon Jik ^a   Lee, Won Jun ^a   Park, Chong Ook ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0035309751     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1337079     Document Type: Article

References (19)

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