Degradation of polyimide and polyethyleneterephtalate irradiated with 150 and 200 keV Ar+ ions, studied by RBS and ERD techniques

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 161-163, Issue , 2000, Pages 1099-1103

  Hnatowicz, V ^a   Perina V ^a   Havranek V ^a   Vosecek V ^a   Novotny J ^a   Vacik J ^a   Svorcik V ^b   Rybka, V ^b   Kluge, A ^c  

^a NUCLEAR PHYSICS INSTITUTE   (Czech Republic)

^b INSTITUTE OF CHEMICAL TECHNOLOGY   (Czech Republic)

^c FRAUNHOFER INSTITUTE FOR INTEGRATED CIRCUITS IIS   (Germany)

Author keywords

Degradation; ERD; Ion implantation; Polymers; RBS

Indexed keywords

ATOMS; BACKSCATTERING; HYDROGEN; IRRADIATION; OXYGEN; POLYETHYLENE TEREPHTHALATES; POLYIMIDES;

ELASTIC RECOIL DETECTION; RUTHERFORD BACKSCATTERING;

ION IMPLANTATION;

EID: 0038668596     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(99)00951-9     Document Type: Article

References (12)

1. T. Venkatesan, L. Calgano, B.S. Elman, G. Foti, in: P. Mazzoldi, G.W. Arnold (Eds.), Ion Beam Modification of Insulators, Elsevier, Amsterdam, 1987, p. 301.
2. A. Chapiro, Nucl. Instr. and Meth. B 32 (1988) 111.
3. M.B. Lewis, E.H. Lee, Nucl. Instr. and Meth. B 61 (1991) 457.
4. D.M. Rueck, G.B. Hoflund, J. Eisenreich, C. Trautmann, D. Wagner, N. Angert, GSI Scientific Report, GSI 94-1, 1995, p. 186.
5. D.K. Avasthi, J.P. Singh, A. Biswas, S.K. Bose, Nucl. Instr. and Meth. B 146 (1998) 504.
6. V. Picq, J.M. Ramillon, E. Balanzat, Nucl. Instr. and Meth. B 146 (1998) 496.
7. J.R. Tesmer, M. Nastasi, Handbook of Modern Ion Beam Materials Analysis, Materials Research Society, Pittsburg, USA, 1995.
8. J. Davenas, G. Boiteux, M. Fallavier, Nucl. Instr. and Meth. B 39 (1989) 796.
9. T. Winzell, I.F. Bubb, R. Short, H.J. Whitlow, P.N. Johnston, Presented at IBA-13 Conference, Lisbon, 1997.
10. Czech. J. Phys., 2000, to be published.
11. J.P. Biersack, L.G. Haggmark, Nucl. Instr. and Meth. 174 (1980) 257.
12. V. Švorčík, V. Rybka, I. Stibor, V. Hnatowicz, J. Vacík, P. Stopka, Polymer Degradation and Stability 58 (1997) 143.