Polarization-based fringe projection interferometer for phase-stepping techniques

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2782, Issue , 2004, Pages 250-257

  Szwaykowski, Piotr ^a  

^a Electro Optical Sciences Inc   (United States)

Author keywords

Interferometry; phase step technique; polarization; surface topography

Indexed keywords

ACQUISITION TIME; COMMON PATH; CONTROLLED VARIABLES; DATA COLLECTION; FRINGE PROJECTION; IN-LINE; LOW-COHERENCE SOURCES; MECHANICAL PARTS; OPTICAL ELEMENTS; OTHER APPLICATIONS; PATH DIFFERENCES; PHASE STEPS; PHASE-STEPPING TECHNIQUE; POLARIZATION BEAM SPLITTERS; SHEARING INTERFEROMETER; TOPOGRAPHY MEASUREMENT; USE PHASE;

COMPUTER CONTROL SYSTEMS; INTERFEROMETERS; INTERFEROMETRY; OPTICAL TESTING; PHASE SHIFT; POLARIZATION; TOPOGRAPHY;

SURFACE TOPOGRAPHY;

EID: 78951487764     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.250751     Document Type: Conference Paper

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