Study of dry oxidation of triangle-shaped silicon nanostructure

Applied Physics Letters

Volumn 69, Issue 12, 1996, Pages 1761-1763

  Liu, J L ^a   Shi, Y ^a   Wang, F ^a   Lu, Y ^a   Gu, S L ^a   Zhang, R ^a   Zheng, Y D ^a  

^a NANJING UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000954780     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.117477     Document Type: Article

References (11)

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