Micropolysilicon high-angular-rate sensor with off-chip wireless transmission

Sensors and Actuators, A: Physical

Volumn 89, Issue 1-2, 2001, Pages 56-63

  Li, Wen J ^a   Mei, Tao ^b   Sun, Winston ^a  

^a CHINESE UNIVERSITY OF HONG KONG   (Hong Kong)

^b INSTITUTE OF INTELLIGENT MACHINES   (China)

Author keywords

[No Author keywords available]

Indexed keywords

MICROELECTROMECHANICAL DEVICES; ROTATION; VIBRATIONS (MECHANICAL); WIRELESS TELECOMMUNICATION SYSTEMS;

HIGH SPEED ROTATION SENSING; MICROROTATION SENSOR; NONCONTACT ROTATION SENSING; WIRELESS SENSOR;

MICROSENSORS;

EID: 0035280358     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(00)00542-2     Document Type: Article

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