Wireless micromachined ceramic pressure sensors

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1999, Pages 511-516

  English, Jennifer M ^a   Allen, Mark G ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CERAMIC MATERIALS; MICROMACHINING; PRESSURE;

WIRELESS MICROMACHINED CERAMIC PRESSURE SENSORS;

SENSORS;

EID: 0032681858     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/memsys.1999.746881     Document Type: Conference Paper

References (7)