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Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films

Volumn 19, Issue 2, 2001, Pages 681-688

Laser damage studies on MgF2 thin films

(8) Protopapa, Maria Lucia a De Tomasi, Ferdinando a Perrone, Maria Rita a Piegari, Angela b Masetti, Enrico b Ristau, Detlev c Quesnel, Etienne d Duparré, Angela e

a INFM (Italy)

b ENEA (Italy)

c LASER ZENTRUM HANNOVER E V (Germany)

d CEA LETI (France)

e FRAUNHOFER INSTITUTE FOR APPLIED OPTICS AND PRECISION ENGINEERING (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; EXCIMER LASERS; MAGNESIUM COMPOUNDS; PHOTOACOUSTIC EFFECT; SCANNING ELECTRON MICROSCOPY; SUBSTRATES; THIN FILMS;

ELECTRON BEAM EVAPORATION; PHOTOACOUSTIC BEAM DEFLECTION;

LASER DAMAGE;

EID: 0035273638 PISSN: 07342101 EISSN: None Source Type: Journal
DOI: 10.1116/1.1347049 Document Type: Article

Times cited : (17)

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