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Volumn 30, Issue 3, 2001, Pages 220-223
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Vanadium doping of 4H SiC from a solid source: Photoluminescence investigation
a a a b |
Author keywords
Compensation; Photoluminescence; Solid source doping; Vanadium doping
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Indexed keywords
CHEMICAL VAPOR DEPOSITION;
PHOTOLUMINESCENCE;
SEMICONDUCTING SILICON COMPOUNDS;
SEMICONDUCTOR DOPING;
SPECTROSCOPIC ANALYSIS;
SUBSTRATES;
VANADIUM;
PHOTOLUMINESCENCE SPECTROSCOPY;
SOLID SOURCE DOPING;
VANADIUM DOPING;
SILICON CARBIDE;
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EID: 0035272523
PISSN: 03615235
EISSN: None
Source Type: Journal
DOI: 10.1007/s11664-001-0019-x Document Type: Article |
Times cited : (7)
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References (11)
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