SCOPUS 정보 검색 플랫폼

Volumn 55, Issue 3, 2001, Pages 257-266

Raman chemical imaging of microcrystallinity in silicon semiconductor devices

(3) Schaeberle, M D a Tuschel, D D a Treado, P J a

Author keywords

Chemical imaging; Ion implantation; Numerical confocai microscopy; Polysilicon; Raman imaging; Raman spectroscopy; Silicon semiconductors; Volumetric imaging

Indexed keywords

ANNEALING; CRYSTALLINE MATERIALS; IMAGING TECHNIQUES; ION IMPLANTATION; MICROSCOPIC EXAMINATION; POLYSILICON; RAMAN SPECTROSCOPY; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR DOPING;

NUMERICAL CONFOCAL MICROSCOPY; RAMAN CHEMICAL IMAGING MICROSCOPES; VOLUMETRIC IMAGING;

SEMICONDUCTING SILICON;

EID: 0035271641 PISSN: 00037028 EISSN: None Source Type: Journal
DOI: 10.1366/0003702011951867 Document Type: Article

Times cited : (13)

References (33)

1
- 0004204965
- Noyes, Norwich
- (1990) Handbook of Semiconductor Silicon Technology
- O'Mara, W.C.¹ Herring, R.B.² Hunt, L.P.³

2
- 0004245602
- SEMATECH, Austin, Texas
- (1999) International Technology Roadmap for Semiconductors

3
- 0003667047
- Springer, Berlin
- (1983) Light Scattering in Solids , vol.1-6
- Cardona, M.¹

4
- 0004080617
- Academic Press, London), Chap. 6
- (1993) Optical Characterization of Semiconductors: Infrared, Raman, and Photoluminescence Spectroscopy
- Perkowitz, S.¹

5
- 0005090147
- J. G. Grasselli and B. J. Bulkin, Eds. (John Wiley and Sons, New York), Chap. 6
- (1991) Analytical Raman Spectroscopy
- Pollak, F.H.¹

6
- 0001395789
- (1993) J. Appl. Phys. , vol.74 , pp. 5907
- Wang, P.D.¹ Cheng, C.² Sotomayor-Torres, C.M.³ Batchelder, D.N.⁴

7
- 0005077775
- (1985) J. Appl. Phys. , vol.58 , pp. 2174
- Kirillov, D.¹ Powell, R.A.² Hodul, D.T.³

8
- 0022709719
- (1986) J. Electrochem. Soc. , vol.1333 , pp. 988
- DeWilton, A.C.¹ Simard-Normandin, M.² Wong, P.T.T.³

9
- 0005011409
- (1989) J. Appl. Phys. , vol.66 , pp. 3515
- Braunstein, G.¹ Tuschel, D.² Chen, S.³ Lee, S.T.⁴

10
- 0001157724
- (1997) Phys. Rev. B , vol.55 , pp. 16205
- Desnica, U.V.¹ Desnica-Frankovic, I.D.² Ivanda, M.³ Furic, K.⁴ Haynes, T.E.⁵

11
- 0001266347
- (1996) Appl. Phys. Lett. , vol.69 , pp. 2650
- Ponce, F.A.¹ Steeds, J.W.² Dyer, C.D.³ Pitt, G.D.⁴

12
- 0005043061
- (1995) J. Appl. Phys. , vol.78 , pp. 3357
- Mizoguchi, K.¹ Yamauchi, Y.² Haruma, H.³ Nakashima, S.⁴ Ipposhi, T.⁵ Inoue, Y.⁶

13
- 0025595035
- (1990) Appl. Spectrosc. , vol.44 , pp. 1679
- Bowden, M.¹ Dickson, G.D.² Gardiner, D.J.³ Wood, D.J.⁴

14
- 0027625747
- (1993) International JSME Journal Series A , vol.36 , pp. 302
- Miura, H.¹ Ohta, H.² Sakata, H.³ Okamoto, N.⁴

15
- 21844520127
- (1995) J. Vac. Sci. Technol., A , vol.13 , pp. 1234
- Ajito, K.¹ Sukamto, J.P.H.² Nagahara, L.A.³ Hashimoto, K.⁴ Fujishima, A.⁵

16
- 0031223039
- (1997) Appl. Spectrosc. , vol.51 , pp. 1405
- Bowden, M.¹ Gardiner, D.J.²

17
- 0005041511
- (1975) Spectrosc. , vol.3 , pp. 33
- Delhaye, M.¹ Dhamelincourt, P.² Raman, J.³

18
- 0005015802
- (1990) Spectrosc. , vol.21 , pp. 37
- Bowden, M.¹ Gardiner, D.J.² Rice, G.³ Gerrard, D.L.⁴ Raman, J.⁵

19
- 0025482271
- (1990) Appl. Spectrosc. , vol.44 , pp. 1270
- Treado, P.J.¹ Govil, A.² Morris, M.D.³ Sternitzke, K.D.⁴ McCreery, R.L.⁵

20
- 0030156667
- (1996) Appl. Spectrosc. , vol.50 , pp. 805
- Morris, H.R.¹ Hoyt, C.C.² Miller, P.³ Treado, P.J.⁴

21
- 0001245352
- (1993) Appl. Spectrosc. , vol.47 , pp. 1256
- Pupples, G.J.¹ Grond, M.² Greve, J.³

22
- 0000067814
- (1991) Adv. Mater. , vol.3 , pp. 566
- Batchelder, D.N.¹ Cheng, C.² Pitt, G.D.³

23
- 65949093191
- (1992) Appl. Spectrosc. , vol.46 , pp. 1211
- Treado, P.J.¹ Levin, I.W.² Lewis, E.N.³

24
- 0033104267
- (1999) Anal. Chem. , vol.71
- Schaeberle, M.D.¹ Morris, H.R.² Turner, J.F.³ Treado, P.J.⁴

25
- 0001273839
- (1997) Proc. SPIE-Int. Soc Opt. Eng. , vol.3061 , pp. 280
- Turner, J.F.¹ Treado, P.J.²

26
- 0345045335
- (1999) Langmuir , vol.15 , pp. 2961
- Morris, H.R.¹ Turner, J.F.² Munro, B.³ Ryntz, R.A.⁴ Treado, P.J.⁵

27
- 0004222360
- Brooks/Cole, Pacific Grove, California, 5th ed.
- (1993) Basic Statistics: Tales of Distributions , pp. 353
- Spatz, C.¹

28
- 0005058304
- (1999) Spectrosc. , vol.30 , pp. 877
- De Wolf, I.¹ Raman, J.²

29
- 0005078212
- European Commission, Science, Research and Development, Luxembourg
- (1998) Raman and Luminescence Spectroscopy of Microelectronics: Catalogue of Optical and Physical Parameters, "Nostradamus" Project SMT4-CT-2024 , pp. 20

30
- 0032098845
- (1998) Appl. Spectrosc. , vol.52 , pp. 783
- Hanley, Q.S.¹ Verveer, P.J.² Jovin, M.³

31
- 0027516644
- (1993) Science , vol.259 , pp. 1330
- Carter, K.C.¹ Bowman, D.² Carrington, W.³ Fogarty, K.⁴ McNeil, J.A.⁵ Fay, F.S.⁶ Lawrence, J.B.⁷

32
- 0020622392
- (1983) Nature , vol.302 , pp. 676
- Agard, D.A.¹ Sedat, J.W.²

33
- 0005003230
- (1997) Spectrosc. , vol.28 , pp. 119
- Kline, N.J.¹ Treado, P.J.² Raman, J.³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.