Experimental model of industrial x-ray source MSX-1 with a vacuum spark for x-ray lithography

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 19, Issue 2, 2001, Pages 482-486

  Semyonov, Oleg G ^a   Gurey, A E ^b   Tikhomirov, A A ^b  

^a Nixon Court ^*  (United States)

^b LEBEDEV PHYSICAL INSTITUTE   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC SPARKS; ELECTRON ENERGY LEVELS; ELECTRON TRANSITIONS; LIGHT EMISSION; MATHEMATICAL MODELS; PLASMA DENSITY; PLASMAS; RADIATION EFFECTS; TEMPERATURE; X RAY LITHOGRAPHY;

INDUSTRIAL X RAY SOURCE; LOW INDUCTANCE VACUUM SPARK DISCHARGE; METALLIC PLASMA; MICROPINCH FORMATION EFFECT; VACUUM SPARK X RAY LITHOGRAPHY;

VACUUM APPLICATIONS;

EID: 0035271339     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1358886     Document Type: Article

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