Characterization of diamond fluorinated by glow discharge plasma treatment

Diamond and Related Materials

Volumn 10, Issue 3-7, 2001, Pages 490-495

  Durrant, Steven F ^a   Baranauskas, Vítor ^a   Peterlevitz, Alfredo C ^a   Castro, Sandra G ^b   Landers, Richard ^b   Bica De Moraes, Mário A ^c  

^a Faculdade E   (Brazil)

^b Grupo Fis Superficies Inst F   (Brazil)

^c Lab Processos Plasma Inst Fis G   (Brazil)

Author keywords

Diamond films; Fluorine; HFCVD; XPS

Indexed keywords

ATOMIC FORCE MICROSCOPY; DENSITY (SPECIFIC GRAVITY); FLUORINE; MAGNETIC RESONANCE SPECTROSCOPY; PLASMA THEORY; RADIOFREQUENCY SPECTROSCOPY; RAMAN SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; SURFACES; X RAY PHOTOELECTRON SPECTROSCOPY;

FLUORINATION;

DIAMOND FILMS;

DIAMOND;

EID: 0035270681     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(00)00534-3     Document Type: Article

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