Structural and optical properties of amorphous hydrogenated fluorinated carbon films produced by PECVD

Thin Solid Films

Volumn 304, Issue 1-2, 1997, Pages 149-156

  Durrant, Steven F ^a   Castro, Sandra G C ^a   Bolívar Marinez, Luz Elena ^a   Galvão, Douglas S ^a   Bica De Moraes, Mário A ^a  

^a UNIVERSITY OF CAMPINAS   (Brazil)

Author keywords

Optical properties; Optical spectroscopy; Plasma processing and deposition; X ray photoelectron spectroscopy

Indexed keywords

CHEMICAL VAPOR DEPOSITION; EMISSION SPECTROSCOPY; LIGHT EMISSION; PHOTONS; PLASMA APPLICATIONS; PRESSURE EFFECTS; SPECTROPHOTOMETRY; X RAY PHOTOELECTRON SPECTROSCOPY;

AMORPHOUS HYDROGENATED FLUORINATED CARBON FILMS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION (PECVD); RADIOFREQUENCY DISCHARGES;

AMORPHOUS FILMS;

EID: 0031193037     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(97)00308-8     Document Type: Article

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